Semiconductor Constructions, And Methods Of Forming Semiconductor Constructions

ABSTRACT

Some embodiments include methods of forming semiconductor constructions. Oxide is formed over a substrate, and first material is formed over the oxide. Second material is formed over the first material. The second material may be one or both of polycrystalline and amorphous silicon. A third material is formed over the second material. A pattern is transferred through the first material, second material, third material, and oxide to form openings. Capacitors may be formed within the openings. Some embodiments include semiconductor constructions in which an oxide is over a substrate, a first material is over the oxide, and a second material containing one or both of polycrystalline and amorphous silicon is over the first material. Third, fourth and fifth materials are over the second material. An opening may extend through the oxide; and through the first, second, third, fourth and fifth materials.

TECHNICAL FIELD

Semiconductor constructions, and methods of forming semiconductorconstructions.

BACKGROUND

Integrated circuit fabrication may involve formation of high aspectratio openings. Such openings may be utilized for fabrication of variouscircuit devices, such as, for example, capacitors. An advantage offorming the circuit devices within the high aspect ratio openings may bethat the devices can then be made to occupy a relatively small footprintof a semiconductor wafer substrate. For instance, capacitors formed inhigh aspect ratio openings may have the same capacitive capacity asother capacitors, but may be formed to be very tall and thin so thatindividual capacitors occupy very little semiconductor real estate.

Difficulties may occur in forming tall, thin capacitors in that thecapacitors may be prone to toppling. Various methods have been developedfor avoiding toppling of tall, thin capacitors, with some of suchmethods comprising formation of a supporting lattice structure thatassists in retaining the capacitors in a desired orientation. Someexample lattice structures are described in U.S. Pat. Nos. 7,226,845 and7,271,051; as well as in U.S. Publication Number 2006/0261440.

An example prior art process for forming openings extending through alattice structure is described with reference to FIGS. 1 and 2.

FIG. 1 shows a semiconductor construction 10 at an early process stageof the process. The construction 10 comprises a semiconductor substrate,or base, 12. Substrate 12 can comprise, consist essentially of, orconsist of, for example, monocrystalline silicon lightly-doped withbackground p-type dopant. The terms “semiconductive substrate” and“semiconductor substrate” mean any construction comprisingsemiconductive material, including, but not limited to, bulksemiconductive materials such as a semiconductive wafer (either alone orin assemblies comprising other materials thereon), and semiconductivematerial layers (either alone or in assemblies comprising othermaterials). The term “substrate” refers to any supporting structure,including, but not limited to, the semiconductive substrates describedabove.

The semiconductor substrate 12 supports a pair of transistors 14 and 16.The transistor 14 comprises a gate 18 and a pair of source/drain regions20 and 22. The source/drain regions extend into base 12, and may beeither n-type majority doped or p-type majority doped. The gate 18comprises a gate dielectric 24, a conductive segment 26, and aninsulative cap 28. The gate dielectric may comprise, for example,silicon dioxide; the conductive segment 26 may comprise one or more ofconductively-doped semiconductor material, metals, and metal-containingcompounds; and the insulative capping layer may comprise, for example,silicon nitride.

A pair of sidewall spacers 30 extend along the opposing sidewalls of thegate 18, and such sidewall spacers may comprise, for example, siliconnitride.

The transistor 16 comprises a gate 32, source/drain region 22, andanother source/drain region 34. The source/drain region 34 extends intobase 12, and may be either n-type majority doped or p-type majoritydoped. The gate 32 comprises the gate dielectric 24, conductive segment26, and insulative cap 28 discussed previously; and sidewall spacers 30are along opposing sidewalls of the gate.

Isolation regions 19 extend into substrate 12 adjacent source/drainregions 20 and 34. The isolation regions may correspond to shallowtrench isolation regions, and may contain silicon dioxide. The isolationregions may electrically isolate source/drain regions 20 and 34 fromother circuitry (not shown).

An electrically insulative material 36 extends over and between thetransistors 14 and 16. Electrically conductive pedestals 38, 40 and 42extended through the electrically insulative material 36 to electricallyconnect with source/drain regions 20, 22 and 34, respectively.

A stack 44 is over the insulative material 36 and pedestals 38, 40 and42. The stack comprises a first oxide-containing material 46, a firstlayer 48 of silicon nitride, a second oxide-containing material 50, anda second layer 52 of silicon nitride. The layers 48 and 52 ultimatelybecome lattices to assist in retaining capacitors. The oxide-containingmaterials 46 and 50 may consist of silicon dioxide, or may consist ofdoped silicon dioxide (for instance, borophosphosilicate glass,phosphosilicate glass, fluorosilicate glass, etc.).

Transparent carbon 54 is over the second layer 52 of silicon nitride,deposited antireflective coating (DARC) 56 is over transparent carbon54, bottom antireflective coating (BARC) 58 is over the DARC, andphotolithographically-patterned photoresist 60 is over the BARC. TheDARC may comprise, for example, silicon oxynitride; and the BARC maycomprise any of various organic materials (i.e., may contain carbon).

The patterned photoresist defines a pair of openings 62 and 66.

FIG. 2 shows construction 10 after the openings 62 and 66 are extendedthrough stack 44 with a plurality of etches, and after the transparentcarbon 54 (FIG. 1), DARC 56 (FIG. 1), BARC 58 (FIG. 1) and photoresist60 (FIG. 1) have been removed. The etches may comprise one more etchesto extend through the BARC 58 and DARC 56 to the transparent carbon 54,followed by a dry etch utilizing O₂/SO₂ to penetrate through thetransparent carbon. Such dry etch may also remove the photoresist 60 andthe BARC 58. A subsequent etch may utilize CH₂F₂, CHF₃ and O₂ topenetrate the upper nitride layer 52, and to remove the DARC 56. Next,C₄F₆, O₂ and Ar may be utilized to pass through the top oxide-containingmaterial 50. An etch comprising CHF₃, O₂, CH₂F₂ and Ar may then beutilized to punch through the second nitride layer 48 and partially intothe bottom oxide-containing material 46. Finally, C₄F₆, O₂ and Ar may beutilized to remove a remaining portion of the bottom oxide-containingmaterial 46 to form the shown openings. The transparent carbon 54(FIG. 1) may be removed after the etching has passed through the topnitride layer 52 utilizing oxidation with O₂, or any other suitableconditions.

A problem that may occur during the transfer of openings 62 and 66 intostack 44 is that bowing may occur in the top oxide-containing material50, as is diagrammatically illustrated by curved regions 51 alongsidewalls of material 50 within openings 62 and 66. Such bowing mayresult from any of various mechanisms, such as, for example, etching ofmaterial 50 during the etch through material 46, thinning of layer 52,etc.

Ultimately, capacitors are to be formed within openings 62 and 66 bydepositing capacitor storage node material, capacitor dielectricmaterial and capacitor plate material within the openings. The bowingwithin openings 62 and 66 complicates such capacitor fabrication.

It would be desired to develop new methods of capacitor fabricationwhich avoid the problems shown in FIG. 2.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1 and 2 are diagrammatic, cross-sectional views of a portion of asemiconductor construction at various process stages of a prior artfabrication process.

FIGS. 3-9 are diagrammatic, cross-sectional views of a portion of asemiconductor construction at various process stages in accordance withan embodiment.

FIG. 10 is a diagrammatic, cross-sectional view of a portion of asemiconductor construction in accordance with an embodiment.

FIG. 11 is a diagrammatic, cross-sectional view of a portion of asemiconductor construction in accordance with an embodiment.

FIGS. 12 and 13 are diagrammatic, cross-sectional views of a portion ofa semiconductor construction at various process stages in accordancewith an embodiment.

FIG. 14 is a diagrammatic view of a computer embodiment.

FIG. 15 is a block diagram showing particular features of themotherboard of the FIG. 13 computer embodiment.

FIG. 16 is a high level block diagram of an electronic systemembodiment.

FIG. 17 is a simplified block diagram of a memory device embodiment.

DETAILED DESCRIPTION OF THE ILLUSTRATED EMBODIMENTS

In some embodiments, the invention includes methods of forming highaspect ratio openings, and in some embodiments the invention furtherincludes methods of forming capacitor structures within the high aspectratio openings. Example embodiments are described with reference toFIGS. 3-17.

Referring to FIG. 3, a semiconductor construction 70 is illustrated. Inreferring to construction 70, similar numbering will be used as isutilized above to describe prior art construction 10 of FIGS. 1 and 2,where appropriate.

Construction 70 comprises the semiconductor base material, or substrate,12 described above, and comprises the paired transistors 14 and 16. Thetransistor 14 comprises the gate 18, and the pair of source/drainregions 20 and 22; and the transistor 16 comprises the gate 32, togetherwith source/drain regions 22 and 34. The sidewall spacers 30 are alongopposing sidewalls of the gates; and the isolation regions 19 areadjacent source/drain regions 20 and 34. The electrically insulativematerial 36 extends over and between the transistors 14 and 16; and theelectrically conductive pedestals 38, 40 and 42 extended throughelectrically insulative material 36 to electrically connect withsource/drain regions 20, 22 and 34, respectively.

A stack 74 is over the insulative material 36 and pedestals 38, 40 and42. The stack 74 comprises materials 76, 78, 80 and 82. Materials 76 and78 may be similar to the materials 46 and 48 of prior art FIGS. 1 and 2.Accordingly, material 76 may be an oxide-containing material, andmaterial 78 may be an electrically insulative nitride-containingmaterial. The oxide-containing material 76 may comprise, consistessentially of, or consist of silicon dioxide, or a doped oxide (forinstance, borophosphosilicate glass, phosphosilicate glass,fluorosilicate glass, etc.); and nitride-containing material 78 maycomprise, consist essentially of, or consist of silicon nitride.Material 76 may be formed to a thickness of at least about 10,000angstroms (for instance, about 15,000 angstroms); and material 78 may beformed to a thickness of from about 250 angstroms to about 500angstroms.

Stack 74 differs from the stack 44 of the prior art (FIG. 1) in thatstack 74 comprises a non-oxidized silicon-containing material 80 overthe nitride-containing material 78. Silicon-containing material 80 maycomprise, consist essentially of, or consist of one or both ofpolycrystalline silicon and amorphous silicon. Such silicon may beconductively doped in some embodiments, and may not be conductivelydoped in other embodiments. The silicon-containing material may beselectively etchable relative to the nitride-containing material 78.Silicon-containing material 80 may be formed to a thickness of, forexample, at least about 3000 angstroms, and in some embodiments may beformed to a thickness of from about 3000 angstroms to about 10,000angstroms.

Stack 74 further comprises a capping material 82 formed over thesilicon-containing material 80. Material 82 may be electricallyinsulative in some embodiments, and may be electrically conductive inother embodiments.

If material 82 is electrically insulative, the material may comprise anysuitable composition to which materials 76 and 80 may be selectivelyetched, and may, for example, comprise, consist essentially of, orconsist of silicon nitride. Accordingly, in some embodiments, materials82 and 78 may both consist of silicon nitride, and may thus be the samecomposition as one another.

If material 82 is electrically conductive, the material may comprise anysuitable composition to which materials 76 and 80 may be selectivelyetched, and may, for example, comprise metal (for instance, tungsten,titanium, etc.) or metal-containing compositions (for instance, metalnitride, metal suicide, etc.).

Material 82 may be formed to a thickness of at least about 1000angstroms (for instance, to a thickness of about 1300 angstroms).

The materials 78, 80 and 82 may be referred to as first, second andthird materials, respectively, that are formed over the oxide-containingmaterial 76. In the shown embodiment, the first material 78 is directlyagainst oxide-containing material 76 (in other words, there are nointervening materials between first material 78 and oxide-containingmaterial 76); second material 80 is directly against first material 78;and third material 82 is directly against second material 80.

Transparent carbon 54, DARC 56, BARC 58, andphotolithographically-patterned photoresist 60 are formed over material82.

The patterned photoresist defines a mask having the pair of openings 62and 66 extending therethrough.

Referring to FIG. 4, openings 62 and 66 are extended through BARC 58 andDARC 56, to an upper surface of transparent carbon 54. The extension ofopenings 62 and 66 into BARC 58 and DARC 56 may be considered a transferof a pattern from mask 60 into the underlying materials.

Referring to FIG. 5, openings 62 and 66 are extended through transparentcarbon 54 with, for example, a dry etch utilizing O₂/SO₂. Such dry etchmay also remove the photoresist 60 (FIG. 4) and the BARC 58 (FIG. 4), asshown.

Referring to FIG. 6, an etch is utilized to extend openings 62 and 66through material 82. If material 82 consists of silicon nitride, asuitable etch may utilize CH₂F₂, CHF₃, Ar and O₂. The etch throughmaterial 82 may also remove the DARC 56 (FIG. 5), as shown.

Referring to FIG. 7, the openings 62 and 66 are extended throughsilicon-containing material 80. The etch utilized to extend the openingsthrough the silicon-containing material may utilize any suitablesilicon-etching technology, and may, for example, utilize O₂ incombination with one or more fluorocarbons, Cl₂ and/or HBr.

Referring to FIG. 8, openings 62 and 66 are extending through material78, and partially into oxide-containing material 76. The etch throughmaterial 78 may be referred to as a second nitride etch to distinguishit from a first nitride etch that had been utilized to penetrate throughmaterial 82. The second nitride etch may comprise the same conditions asthose utilized for the first nitride etch. In some embodiments, the etchthrough material 78 may utilize CHF₃, Ar, O₂ and CH₂F₂.

Referring to FIG. 9, openings 62 and 66 are extended through a remainingportion of the oxide-containing material 76. The etch through theremaining portion of the oxide-containing material may utilize C₄F₆ andO₂.

The transparent carbon 54 (FIG. 8) is removed at the processing stage ofFIG. 9. The transparent carbon may be removed utilizing oxidation withO₂, or any other suitable conditions.

The construction 70 of FIG. 9 is at a similar processing stage to theprior art construction 10 of FIG. 2, but advantageously does not havethe prior art bowing problem discussed with reference to FIG. 2. In someembodiments, the bowing may be entirely eliminated, and in otherembodiments the bowing may be alleviated although not entirelyeliminated. Regardless, alleviation or elimination of the bowing problemcan improve subsequent process steps of forming capacitors or othercircuitry within openings 62 and 66. Another prior art problem which maybe alleviated or eliminated by the processing of FIGS. 3-9 is a problemreferred to as twisting, where pillars adjacent an opening rotate aboutaxes extending through the pillars, or where walls adjacent an openingbend along planes extending through the walls. The elimination oralleviation of twisting may also improve subsequent process steps offorming capacitors or other circuitry within openings 62 and 66.

If capacitors are formed within openings 62 and 66, such capacitors mayhave any suitable configuration, and may, for example, be pillar-typecapacitors or container-type capacitors. FIGS. 10 and 11 illustrateexample embodiments of container-type capacitors the may be formedwithin openings 62 and 66.

Referring to FIG. 10, capacitor storage node material 90 is formedwithin openings 62 and 66, and in electrical connection with pillars 38and 42. The capacitor storage node material may comprise any suitableelectrically conductive composition, or combination of electricallyconductive compositions; and may, for example, comprise one or more ofconductively-doped semiconductor materials (for instance,conductively-doped silicon, etc.), metals (for instance, titanium,tungsten, platinum, etc.) and metal-containing compounds (for instance,metal silicides, metal nitride, etc.). The storage node material ispatterned so that the material is within the openings, but does notextend outwardly the openings.

After the capacitor storage node material 90 is formed, at least some ofthe materials 76 and 80 (FIG. 9) may be removed. At least portions ofmaterials 76 and 80 may thus be sacrificial in some embodiments. Afterportions of materials 76 and 80 are removed, only lattice materials 78and 82 remain to laterally support the storage node material.

Capacitor dielectric material 92 is formed within openings 62 and 66,and over storage of material 90. The capacitor dielectric material maybe formed on both sides of the storage nodes in the showncross-sectional view due to the portions of materials 76 and 80 (FIG. 9)having been removed. The capacitor dielectric material may comprise anysuitable electrically insulative composition or combination ofelectrically insulative compositions; and may, for example, comprisesilicon dioxide, silicon nitride, and/or any of various high-k materials(with high-k materials being materials having a dielectric constantgreater than that of silicon dioxide).

Capacitor plate material 94 is formed over the capacitor dielectricmaterial and within openings 62 and 66. The capacitor plate material maybe formed on both sides of the storage nodes in the showncross-sectional view due to the portions of materials 76 and 80 (FIG. 9)having been removed. The capacitor plate material may comprise anysuitable electrically conductive composition or combination ofelectrically conductive compositions; and may, for example, comprise oneor more of materials discussed above as being suitable for capacitorstorage node material 90.

The embodiment of FIG. 10 may be considered to comprise dynamic randomaccess (DRAM) unit cells containing the capacitors and transistors. Thecentral pedestal 40 may be electrically connected with a bitline 95.Accordingly, the embodiment of FIG. 10 may comprise a pair of DRAM unitcells sharing a connection to a bitline. Such DRAM unit cells may berepresentative of large number of DRAM unit cells simultaneouslyfabricated as a DRAM array.

The embodiment of FIG. 10 has the dielectric material 92 extendingacross capping layer 82. In other embodiments, the dielectric materialmay be contained within openings 62 and 66 so that the capping materialdirect the contacts capacitor plate material 94. If the capping material82 comprises an electrically conductive composition, such mayadvantageously become part of the capacitor plate that extends acrossconstruction 70. FIG. 11 shows an embodiment in which the cappingmaterial 82 comprises an electrically conductive composition, andphysically contacts capacitor plate material 94. The same numbering isutilized for the structures of FIG. 11 as is utilized for the structuresof FIG. 10. The construction of FIG. 11, like that of FIG. 10, may beconsidered to be a portion of a DRAM array.

The embodiments of FIGS. 3-11 have two layers of lattice material (78and 82), and a single layer of non-oxidized silicon (80). In otherembodiments, more than two layers of lattice material may be formed, andmore than one layer of non-oxidized silicon may be formed. For instance,FIG. 12 shows a construction, 100 comprising three layers of latticematerial and two layers of non-oxidized silicon. In referring to FIG.12, similar numbering will be used as is utilized above described FIGS.3-11, where appropriate.

Construction 100 comprises the oxide-containing material 76, firstmaterial 78, and non-oxidized silicon-containing material 80 discussedabove. The first material 78 may be considered a first lattice material,and construction 100 further comprises a second lattice material 102over non-oxidized silicon-containing material 80. Additionally,construction 100 comprises a second non-oxidized silicon-containingmaterial 104 over the second lattice material, and comprises a thirdlattice material 106 over material 104.

The lattice material 106 may comprise any of the compositions asdiscussed above relative to capping layer 82, and/or may comprise acommon composition as one or both of lattice materials 78 and 102. Insome embodiments, all of the lattice materials 78, 102 and 106 will bethe same composition as one another, and will all comprise, consistessentially of, or consist of silicon nitride.

The materials 78, 80, 102, 104, and 106 may be referred to as first,second, third, fourth and fifth materials, respectively, in someembodiments.

The materials 80 and 104 may be the same composition as one another, andmay both comprise, consist essentially of, or consist of one or both ofpolycrystalline silicon and amorphous silicon; and may or may not beconductively-doped.

In subsequent processing, capacitors may be formed within the openings62 and 66 of construction 100, and such capacitors may be, for example,analogous to the capacitors of FIG. 10 or the capacitors of FIG. 11.FIG. 13 shows construction 100 after formation of capacitors analogousto those of FIG. 10, and thus shows a portion of a DRAM array.

The various constructions discussed above may be utilized in electronicsystems, such as cars, airplanes, cell phones, computers, etc.

FIG. 14 illustrates an embodiment of a computer system 400. Computersystem 400 includes a monitor 401 or other communication output device,a keyboard 402 or other communication input device, and a motherboard404. Motherboard 404 may carry a microprocessor 406 or other dataprocessing unit, and at least one memory device 408. Memory device 408may comprise an array of memory cells, and such array may be coupledwith addressing circuitry for accessing individual memory cells in thearray. Further, the memory cell array may be coupled to a read circuitfor reading data from the memory cells. The addressing and readcircuitry may be utilized for conveying information between memorydevice 408 and processor 406. Such is illustrated in the block diagramof the motherboard 404 shown in FIG. 15. In such block diagram, theaddressing circuitry is illustrated as 410 and the read circuitry isillustrated as 412.

Processor device 406 may correspond to a processor module, andassociated memory utilized with the module may comprise DRAM formed inaccordance with embodiments disclosed herein.

Memory device 408 may correspond to a memory module, and may compriseDRAM formed in accordance with embodiments disclosed herein.

FIG. 16 illustrates a simplified block diagram of a high-levelorganization of an electronic system 700. System 700 may correspond to,for example, a computer system, a process control system, or any othersystem that employs a processor and associated memory. Electronic system700 has functional elements, including a processor 702, a control unit704, a memory device unit 706 and an input/output (I/O) device 708 (itis to be understood that the system may have a plurality of processors,control units, memory device units and/or I/O devices in variousembodiments). Generally, electronic system 700 will have a native set ofinstructions that specify operations to be performed on data by theprocessor 702 and other interactions between the processor 702, thememory device unit 706 and the I/O device 708. The control unit 704coordinates all operations of the processor 702, the memory device 706and the I/O device 708 by continuously cycling through a set ofoperations that cause instructions to be fetched from the memory device706 and executed. The memory device 706 may include DRAM formed inaccordance with embodiments disclosed herein.

FIG. 17 is a simplified block diagram of an electronic system 800. Thesystem 800 includes a memory device 802 that has an array of memorycells 804, address decoder 806, row access circuitry 808, column accesscircuitry 810, read/write control circuitry 812 for controllingoperations, and input/output circuitry 814. The memory device 802further includes power circuitry 816, and sensors 820, such as currentsensors for determining whether a memory cell is in a low-thresholdconducting state or in a high-threshold non-conducting state. Theillustrated power circuitry 816 includes power supply circuitry 880,circuitry 882 for providing a reference voltage, circuitry 884 forproviding a first wordline with pulses, circuitry 886 for providing asecond wordline with pulses, and circuitry 888 for providing a bitlinewith pulses. The system 800 also includes a processor 822, or memorycontroller for memory accessing.

The memory device 802 receives control signals from the processor 822over wiring or metallization lines. The memory device 802 is used tostore data which is accessed via I/O lines. At least one of theprocessor 822 or memory device 802 may include DRAM formed in accordancewith embodiments disclosed herein.

The various electronic systems may be fabricated in single-packageprocessing units, or even on a single semiconductor chip, in order toreduce the communication time between the processor and the memorydevice(s).

The electronic systems may be used in memory modules, device drivers,power modules, communication modems, processor modules, andapplication-specific modules, and may include multilayer, multichipmodules.

The electronic systems may be any of a broad range of systems, such asclocks, televisions, cell phones, personal computers, automobiles,industrial control systems, aircraft, etc.

In compliance with the statute, the subject matter disclosed herein hasbeen described in language more or less specific as to structural andmethodical features. It is to be understood, however, that the claimsare not limited to the specific features shown and described, since themeans herein disclosed comprise example embodiments. The claims are thusto be afforded full scope as literally worded, and to be appropriatelyinterpreted in accordance with the doctrine of equivalents.

1. A method of forming a semiconductor construction, comprising: forminga silicon dioxide-containing material over a semiconductor substrate;forming a first material over the silicon dioxide-containing material;forming a second material over the first material, the silicondioxide-containing material and the first material being selectivelyetchable relative to the second material, the second material comprisingone or both of polycrystalline silicon and amorphous silicon; forming athird material over the second material; forming a patterned mask overthe third material; and transferring a pattern from the mask through thefirst material, second material, third material, and silicondioxide-containing material with one or more suitable etches to formopenings extending through the first material, second material, thirdmaterial, and silicon dioxide-containing material.
 2. The method ofclaim 1 wherein the first and third materials consist of siliconnitride.
 3. The method of claim 1 wherein the first material consists ofsilicon nitride and wherein the third material comprises a compositionother than silicon nitride.
 4. The method of claim 3 wherein the thirdmaterial comprises an electrically conductive composition.
 5. The methodof claim 4 further comprising: forming capacitor storage node materialwithin the openings; forming capacitor dielectric material over thecapacitor storage node material; and utilizing the electricallyconductive third material as capacitor plate material for capacitorscomprising the capacitor storage node material and the dielectricmaterial.
 6. The method of claim 1 further comprising forming a fourthmaterial over the third material, and forming a fifth material over thefourth material; and wherein: the fourth material is identical incomposition to the second material; and the transferring the patterncomprises transferring the pattern through the first material, secondmaterial, third material, fourth material, fifth material and silicondioxide-containing material to form the openings to extend through thefirst material, second material, third material, fourth material, fifthmaterial and silicon dioxide-containing material.
 7. The method of claim6 wherein the first, third and fifth materials consist of siliconnitride.
 8. The method of claim 1 further comprising: forming capacitorstorage node material within the openings; forming capacitor dielectricmaterial over the capacitor storage node material; and forming capacitorplate material over the capacitor dielectric material.
 9. A method offorming a semiconductor construction, comprising: forming an oxide overa semiconductor substrate, the oxide having a thickness of at leastabout 10,000 Å; forming an electrically insulative nitride over theoxide; forming silicon-containing material over the nitride, thesilicon-containing material comprising one or both of polycrystallinesilicon and amorphous silicon, the silicon-containing material having athickness of at least about 3,000 Å; forming a capping material over thesilicon-containing material; forming a patterned mask over the cappingmaterial; and transferring a pattern from the mask through the cappingmaterial, silicon-containing material, nitride, and oxide with one ormore suitable etches to form openings extending through the cappingmaterial, silicon-containing material, nitride, and oxide.
 10. Themethod of claim 9 wherein the capping material is electricallyconductive.
 11. The method of claim 9 wherein the capping material iselectrically insulative.
 12. The method of claim 9 wherein thesilicon-containing material is directly against the nitride; wherein thecapping material is directly against the silicon-containing material,and wherein the capping material comprises an electrically insulativenitride.
 13. A method of forming a semiconductor construction,comprising: forming a silicon dioxide-containing material over asemiconductor base material; forming a first silicon nitride-containingmaterial over the silicon dioxide-containing material; forming anon-oxidized silicon material over and directly against the firstsilicon nitride-containing material; forming a second siliconnitride-containing material over and directly against the non-oxidizedsilicon material; and providing a patterned mask over the second siliconnitride-containing material, and transferring the pattern from the maskinto the underlying materials to form openings extending through saidmaterials, the transferring of the pattern comprising: etching throughthe second silicon nitride-containing material with a first etch;etching through the non-oxidized silicon material with a second etch;etching through the first silicon nitride-containing material with athird etch; and etching through the silicon dioxide-containing materialwith a fourth etch.
 14. The method of claim 13 wherein the first andthird etches utilize identical conditions as one another.
 15. The methodof claim 13 further comprising: forming capacitor storage node materialwithin the openings; forming capacitor dielectric material over thecapacitor storage node material; and forming capacitor plate materialover the capacitor dielectric material.
 16. A method of forming asemiconductor construction, comprising: forming a silicondioxide-containing material over a semiconductor substrate; forming afirst silicon nitride-containing material over the silicondioxide-containing material; forming a silicon-containing material overthe silicon nitride-containing material, the silicon-containing materialcomprising one or both of polycrystalline silicon and amorphous silicon;forming a second silicon nitride-containing material over thesilicon-containing material; forming transparent carbon over the secondsilicon nitride-containing material; forming silicon oxynitride over thetransparent carbon; forming a carbon-containing antireflective coatingover the silicon oxynitride; forming patterned photoresist mask over thecarbon-containing antireflective coating; transferring a pattern fromthe photoresist mask to the transparent carbon; transferring the patternthrough the transparent carbon with a dry etch; transferring the patternthrough the second silicon nitride-containing material with a firstnitride etch; transferring the pattern through the silicon-containingmaterial with a silicon etch; transferring the pattern through the firstsilicon nitride-containing material and partially into the silicondioxide-containing material with a second nitride etch; and transferringthe pattern through a remaining portion of the silicondioxide-containing material with an oxide etch; the pattern within thesilicon dioxide-containing material, first silicon nitride-containingmaterial, silicon-containing material, and second siliconnitride-containing material forming a plurality of openings.
 17. Themethod of claim 16 wherein the silicon etch utilizes anoxygen-containing reactant.
 18. The method of claim 16 wherein: thesilicon dioxide-containing material has a thickness of from about 10,000Å to about 20,000 Å; and the silicon-containing material has a thicknessof from about 3,000 Å to about 10,000 Å.
 19. The method of claim 16wherein: the silicon dioxide-containing material has a thickness of fromabout 10,000 Å to about 20,000 Å; the first silicon nitride-containingmaterial has a thickness of from about 250 Å to about 500 Å; thesilicon-containing material has a thickness of from about 3,000 Å toabout 10,000 Å; and the second silicon nitride-containing material has athickness of from about 1000 Å to about 1500 Å.
 20. The method of claim16 further comprising: forming capacitor storage node material withinthe openings; forming capacitor dielectric material over the capacitorstorage node material; and forming capacitor plate material over thecapacitor dielectric material. 22-25. (canceled)